Methyl Ethanesulfonate is a sulfonic acid ester that is transparent at around 157 nm region, and is used in DFT calculations of vacuum-UV spectra in order to design the vinyl alkylsulfonate polymers for vacuum-UV photoresist applications.
参考文献
Fujigaya, T., et al.: J. Photopolym. Sci. Tec., 15, 643 (2002);